Inventor
BIVENS DARIN
US11 patents
⚠️ This page may combine multiple inventors who share the name “BIVENS DARIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
10 patentsUS7909961B2Mar 22, 2011
Method and apparatus for photomask plasma etching
APPLIED MATERIALS INC21 citations92
US8002946B2Aug 23, 2011
Mask etch plasma reactor with cathode providing a uniform distribution of etch rate
APPLIED MATERIALS INC8 citations83
US7967930B2Jun 28, 2011
Plasma reactor for processing a workpiece and having a tunable cathode
APPLIED MATERIALS INC11 citations83
US7943005B2May 17, 2011
Method and apparatus for photomask plasma etching
APPLIED MATERIALS INC15 citations83
US7520999B2Apr 21, 2009
Method of processing a workpiece in a plasma reactor with dynamic adjustment of the plasma source power applicator and the workpiece relative to one another
APPLIED MATERIALS INC16 citations83
US7504041B2Mar 17, 2009
Method of processing a workpiece in a plasma reactor employing a dynamically adjustable plasma source power applicator
APPLIED MATERIALS INC13 citations83
US8012366B2Sep 6, 2011
Process for etching a transparent workpiece including backside endpoint detection steps
APPLIED MATERIALS INC3 citations62
US7431797B2Oct 7, 2008
Plasma reactor with a dynamically adjustable plasma source power applicator
APPLIED MATERIALS INC2 citations62
US7419551B2Sep 2, 2008
Plasma reactor with apparatus for dynamically adjusting the plasma source power applicator and the workpiece relative to one another
APPLIED MATERIALS INC4 citations62
US7964818B2Jun 21, 2011
Method and apparatus for photomask etching
APPLIED MATERIALS INC3 citations61