Inventor

MITSUIKI AKIRA

JP9 patents

⚠️ This page may combine multiple inventors who share the name “MITSUIKI AKIRA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NEC CORP

3 patents

US6376383B2Apr 23, 2002

Method for etching silicon layer

NEC CORP23 citations90

US6372602B1Apr 16, 2002

Method of forming a shallow trench isolation structure in a semiconductor device

NEC CORP17 citations82

US6200902B1Mar 13, 2001

Method of etching a layer in a semiconductor device

NEC CORP5 citations60

RENESAS ELECTRONICS CORP

2 patents

US9589954B2Mar 7, 2017

Semiconductor device having recess filled with insulating material provided between source/drain impurity region and gate insulator

RENESAS ELECTRONICS CORP5 citations68

US10078182B2Sep 18, 2018

Semiconductor device and method for manufacturing the same

RENESAS ELECTRONICS CORP0 citations40

SEMICONDUCTOR LEADING EDGE TEC

1 patent

US6716761B2Apr 6, 2004

Method of forming fine patterns

SEMICONDUCTOR LEADING EDGE TEC38 citations90

NEC ELECTRONICS CORP

1 patent

US7462566B2Dec 9, 2008

Method for manufacturing semiconductor device

NEC ELECTRONICS CORP3 citations62

NEC ELECTRONICS CORPORATIONS

1 patent

US7510981B2Mar 31, 2009

Method for manufacturing semiconductor device

NEC ELECTRONICS CORPORATIONS3 citations55

MITSUIKI AKIRA

1 patent

US8492227B2Jul 23, 2013

Method of forming side wall spacers for a semiconductor device

MITSUIKI AKIRA1 citations43