Inventor
BERNARD ROLAND
FR14 patents
⚠️ This page may combine multiple inventors who share the name “BERNARD ROLAND”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CIT ALCATEL
12 patentsUS6316045B1Nov 13, 2001
Method and apparatus for conditioning the atmosphere in a process chamber
CIT ALCATEL37 citations94
US6422823B2Jul 23, 2002
Mini-environment control system and method
CIT ALCATEL26 citations92
US6649019B2Nov 18, 2003
Apparatus for conditioning the atmosphere in a vacuum chamber
CIT ALCATEL16 citations91
US6643014B2Nov 4, 2003
Method and a system for identifying gaseous effluents, and a facility provided with such a system
CIT ALCATEL23 citations90
US6910497B2Jun 28, 2005
Semiconductor component manufacturing plant with ventilated false floor
CIT ALCATEL14 citations83
US7572110B2Aug 11, 2009
Pumping apparatus using thermal transpiration micropumps
CIT ALCATEL8 citations82
US7694700B2Apr 13, 2010
Apparatus for transporting substrates under a controlled atmosphere
CIT ALCATEL8 citations80
US7219692B2May 22, 2007
Apparatus for conditioning the atmosphere in a chamber
CIT ALCATEL5 citations72
US6402479B1Jun 11, 2002
Apparatus for pumping out transfer chambers for transferring semiconductor equipment
CIT ALCATEL11 citations68
US7735648B2Jun 15, 2010
Transport pod with protection by the thermophoresis effect
CIT ALCATEL2 citations60
US7350544B2Apr 1, 2008
Station for controlling and purging a mini-environment
CIT ALCATEL2 citations58
US7998426B2Aug 16, 2011
Plasma-based gas treatment system integrated in a vacuum pump
CIT ALCATEL1 citations48