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Inventor

BARTHOD BENOIT

FR7 patents
⚠️ This page may combine multiple inventors who share the name “BARTHOD BENOIT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CIT ALCATEL

5 patents
US6027317AFeb 22, 2000

Scroll type machine

CIT ALCATEL19 citations81
US7095038B2Aug 22, 2006

EUV source

CIT ALCATEL15 citations77
US5439357AAug 8, 1995

Magnetically guided positive-displacement machine

CIT ALCATEL13 citations71
US6050793AApr 18, 2000

Scroll type fluid displacement machine

CIT ALCATEL10 citations70
US5370508ADec 6, 1994

Positive-displacement machine having orbital motion

CIT ALCATEL7 citations67

COMMISSARIAT ENERGIE ATOMIQUE

1 patent
US7399981B2Jul 15, 2008

Apparatus for generating light in the extreme ultraviolet and use in a light source for extreme ultraviolet lithography

COMMISSARIAT ENERGIE ATOMIQUE20 citations81

ALCATEL LUCENT

1 patent
US7515687B2Apr 7, 2009

Compact source with very bright X-ray beam

ALCATEL LUCENT4 citations61