Inventor
SOER WOUTER ANTHON
NL40 patents
⚠️ This page may combine multiple inventors who share the name “SOER WOUTER ANTHON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
16 patentsUS7541603B2Jun 2, 2009
Radiation system and lithographic apparatus comprising the same
ASML NETHERLANDS BV6 citations72
US8742381B2Jun 3, 2014
Radiation source with cleaning apparatus
ASML NETHERLANDS BV3 citations63
US8345223B2Jan 1, 2013
Optical element, lithographic apparatus including such an optical element, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV4 citations63
US7952084B2May 31, 2011
Radiation source and lithographic apparatus
ASML NETHERLANDS BV2 citations63
US7839482B2Nov 23, 2010
Assembly comprising a radiation source, a reflector and a contaminant barrier
ASML NETHERLANDS BV2 citations63
US7771896B2Aug 10, 2010
Patterning device, method of providing a patterning device, photolithographic apparatus and device manufacturing method
ASML NETHERLANDS BV4 citations63
US7759663B1Jul 20, 2010
Self-shading electrodes for debris suppression in an EUV source
ASML NETHERLANDS BV4 citations63
US7696492B2Apr 13, 2010
Radiation system and lithographic apparatus
ASML NETHERLANDS BV6 citations61
US7928412B2Apr 19, 2011
Lithographic apparatus, and device manufacturing method
ASML NETHERLANDS BV3 citations60
US7687788B2Mar 30, 2010
Debris prevention system, radiation system, and lithographic apparatus
ASML NETHERLANDS BV2 citations60
US7629594B2Dec 8, 2009
Lithographic apparatus, and device manufacturing method
ASML NETHERLANDS BV2 citations59
US7737418B2Jun 15, 2010
Debris mitigation system and lithographic apparatus
ASML NETHERLANDS BV1 citations52
US7615767B2Nov 10, 2009
Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby
ASML NETHERLANDS BV0 citations52
US7863591B2Jan 4, 2011
Radiation system and lithographic apparatus comprising the same
ASML NETHERLANDS BV0 citations51
US7724349B2May 25, 2010
Device arranged to measure a quantity relating to radiation and lithographic apparatus
ASML NETHERLANDS BV0 citations48
US7629593B2Dec 8, 2009
Lithographic apparatus, radiation system, device manufacturing method, and radiation generating method
ASML NETHERLANDS BV0 citations41
SOER WOUTER ANTHON
11 patentsUS8227771B2Jul 24, 2012
Debris prevention system and lithographic apparatus
SOER WOUTER ANTHON3 citations62
US8120752B2Feb 21, 2012
Lithographic apparatus
SOER WOUTER ANTHON2 citations62
US8263950B2Sep 11, 2012
Radiation source
SOER WOUTER ANTHON2 citations61
US9041912B2May 26, 2015
Spectral purity filters for use in a lithographic apparatus
SOER WOUTER ANTHON3 citations60
US9195152B2Nov 24, 2015
Spectral purity filter, lithographic apparatus, and method for manufacturing a spectral purity filter
SOER WOUTER ANTHON3 citations57
US9726989B2Aug 8, 2017
Spectral purity filter
SOER WOUTER ANTHON0 citations52
US8836917B2Sep 16, 2014
Zone plate
SOER WOUTER ANTHON0 citations52
US8817237B2Aug 26, 2014
Spectral purity filter, lithographic apparatus, and method for manufacturing a spectral purity filter
SOER WOUTER ANTHON0 citations52
US8289499B2Oct 16, 2012
Optical element, lithographic apparatus including such an optical element, device manufacturing method, and device manufactured thereby
SOER WOUTER ANTHON0 citations52
US8242471B2Aug 14, 2012
Radiation source and lithographic apparatus including a contamination trap
SOER WOUTER ANTHON1 citations51
US8390788B2Mar 5, 2013
Spectral purity filters for use in a lithographic apparatus
SOER WOUTER ANTHON0 citations49
VAN HERPEN MAARTEN MARINUS JOHANNES WILHELMUS
4 patentsUS8071963B2Dec 6, 2011
Debris mitigation system and lithographic apparatus
VAN HERPEN MAARTEN MARINUS JOHANNES WILHELMUS7 citations83
US9465306B2Oct 11, 2016
Source module of an EUV lithographic apparatus, lithographic apparatus, and method for manufacturing a device
VAN HERPEN MAARTEN MARINUS JOHANNES WILHELMUS0 citations52
US8665420B2Mar 4, 2014
Spectral purity filter and lithographic apparatus
VAN HERPEN MAARTEN MARINUS JOHANNES WILHELMUS1 citations52
US8593617B2Nov 26, 2013
Lithographic apparatus, plasma source, and reflecting method
VAN HERPEN MAARTEN MARINUS JOHANNES WILHELMUS0 citations52
LUMILEDS LLC
4 patentsUS10490710B2Nov 26, 2019
Hybrid chip-on-board LED module with patterned encapsulation
LUMILEDS LLC1 citations71
US11825572B2Nov 21, 2023
Color tunable light emitting diode (LED) systems, LED lighting systems, and methods
LUMILEDS LLC0 citations62
US10887960B2Jan 5, 2021
Color tunable light emitting diode (LED) systems, LED lighting systems, and methods
LUMILEDS LLC0 citations62
US11075327B2Jul 27, 2021
Hybrid chip-on-board LED module with patterned encapsulation
LUMILEDS LLC0 citations61
BANINE VADIM YEVGENYEVICH
2 patentsUS8416391B2Apr 9, 2013
Radiation source, lithographic apparatus and device manufacturing method
BANINE VADIM YEVGENYEVICH8 citations84
US8405051B2Mar 26, 2013
Method for removing a deposition on an uncapped multilayer mirror of a lithographic apparatus, lithographic apparatus and device manufacturing method
BANINE VADIM YEVGENYEVICH2 citations62