Inventor
FRANKEN JOHANNES CHRISTIAAN LEONARDUS
NL15 patents
⚠️ This page may combine multiple inventors who share the name “FRANKEN JOHANNES CHRISTIAAN LEONARDUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
13 patentsUS7868304B2Jan 11, 2011
Method for removal of deposition on an optical element, lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV17 citations83
US7462841B2Dec 9, 2008
Lithographic apparatus, device manufacturing method, and use of a radiation collector
ASML NETHERLANDS BV9 citations81
US7501642B2Mar 10, 2009
Radiation source
ASML NETHERLANDS BV7 citations73
US7541603B2Jun 2, 2009
Radiation system and lithographic apparatus comprising the same
ASML NETHERLANDS BV6 citations72
US9753383B2Sep 5, 2017
Radiation source and lithographic apparatus
ASML NETHERLANDS BV2 citations69
US7889312B2Feb 15, 2011
Apparatus comprising a rotating contaminant trap
ASML NETHERLANDS BV2 citations62
US7897941B2Mar 1, 2011
Lithographic apparatus, device manufacturing method, and use of a radiation collector
ASML NETHERLANDS BV2 citations59
US10394141B2Aug 27, 2019
Radiation source and lithographic apparatus
ASML NETHERLANDS BV1 citations58
US9753372B2Sep 5, 2017
Radiation source for an EUV optical lithographic apparatus, and lithographic apparatus comprising such a radiation source
ASML NETHERLANDS BV1 citations51
US7863591B2Jan 4, 2011
Radiation system and lithographic apparatus comprising the same
ASML NETHERLANDS BV0 citations51
US12072620B2Aug 27, 2024
Method of manufacturing a membrane assembly
ASML NETHERLANDS BV0 citations48
US7724349B2May 25, 2010
Device arranged to measure a quantity relating to radiation and lithographic apparatus
ASML NETHERLANDS BV0 citations48
US7843548B2Nov 30, 2010
Conduit system for a lithographic apparatus, lithographic apparatus, pump, and method for substantially reducing vibrations in a conduit system
ASML NETHERLANDS BV0 citations43