Inventor
DRIESSEN NIELS MACHIEL
NL4 patents
Patents
4 patentsUS7541603B2Jun 2, 2009
Radiation system and lithographic apparatus comprising the same
ASML NETHERLANDS BV6 citations72
US7397538B2Jul 8, 2008
Radiation system and lithographic apparatus
ASML NETHERLANDS BV3 citations61
US7863591B2Jan 4, 2011
Radiation system and lithographic apparatus comprising the same
ASML NETHERLANDS BV0 citations51
US7724349B2May 25, 2010
Device arranged to measure a quantity relating to radiation and lithographic apparatus
ASML NETHERLANDS BV0 citations48