Inventor
PLUMB FREDERICK
GB4 patents
Patents
4 patentsUS5399871AMar 21, 1995
Plasma flood system for the reduction of charging of wafers during ion implantation
APPLIED MATERIALS INC87 citations94
US4754200AJun 28, 1988
Systems and methods for ion source control in ion implanters
APPLIED MATERIALS INC54 citations94
US4743767AMay 10, 1988
Systems and methods for ion implantation
APPLIED MATERIALS INC78 citations94
US4825087AApr 25, 1989
System and methods for wafer charge reduction for ion implantation
APPLIED MATERIALS INC36 citations92