Inventor
HARRISON BERNARD
GB9 patents
Patents
9 patentsUS4754200AJun 28, 1988
Systems and methods for ion source control in ion implanters
APPLIED MATERIALS INC54 citations94
US4743767AMay 10, 1988
Systems and methods for ion implantation
APPLIED MATERIALS INC78 citations94
US6908836B2Jun 21, 2005
Method of implanting a substrate and an ion implanter for performing the method
APPLIED MATERIALS INC26 citations92
US6956223B2Oct 18, 2005
Multi-directional scanning of movable member and ion beam monitoring arrangement therefor
APPLIED MATERIALS INC24 citations91
US5747936AMay 5, 1998
Ion implantation apparatus with improved post mass selection deceleration
APPLIED MATERIALS INC28 citations86
US7282427B1Oct 16, 2007
Method of implanting a substrate and an ion implanter for performing the method
APPLIED MATERIALS INC11 citations82
US7049210B2May 23, 2006
Method of implanting a substrate and an ion implanter for performing the method
APPLIED MATERIALS INC11 citations82
US7253424B2Aug 7, 2007
Method of implanting a substrate and an ion implanter for performing the method
APPLIED MATERIALS INC6 citations72
US7235797B2Jun 26, 2007
Method of implanting a substrate and an ion implanter for performing the method
APPLIED MATERIALS INC3 citations62