P

Inventor

KOBAYASHI YOICHI

JP78 patents
⚠️ This page may combine multiple inventors who share the name “KOBAYASHI YOICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

EBARA CORP

18 patents
US7822500B2Oct 26, 2010

Polishing apparatus and polishing method

EBARA CORP50 citations98
US7645181B2Jan 12, 2010

Polishing state monitoring apparatus and polishing apparatus

EBARA CORP13 citations92
US7438627B2Oct 21, 2008

Polishing state monitoring method

EBARA CORP17 citations92
US7313452B2Dec 25, 2007

Substrate transfer controlling apparatus and substrate transferring method

EBARA CORP23 citations92
US7214122B2May 8, 2007

Substrate polishing apparatus

EBARA CORP19 citations92
US7072730B2Jul 4, 2006

Substrate transfer controlling apparatus and substrate transferring method

EBARA CORP25 citations92
US6772029B2Aug 3, 2004

Wafer transfer control apparatus and method for transferring wafer

EBARA CORP17 citations92
US6758723B2Jul 6, 2004

Substrate polishing apparatus

EBARA CORP20 citations92
US6315858B1Nov 13, 2001

Gas polishing apparatus and method

EBARA CORP46 citations91
US7300332B2Nov 27, 2007

Polished state monitoring apparatus and polishing apparatus using the same

EBARA CORP21 citations90
US7585204B2Sep 8, 2009

Substrate polishing apparatus

EBARA CORP4 citations74
US10399203B2Sep 3, 2019

Polishing method and polishing apparatus

EBARA CORP4 citations73
US10056277B2Aug 21, 2018

Polishing method

EBARA CORP2 citations73
US9999955B2Jun 19, 2018

Polishing apparatus and polished-state monitoring method

EBARA CORP4 citations73
US9550269B2Jan 24, 2017

Polishing device and polishing method

EBARA CORP2 citations73
US9390986B2Jul 12, 2016

Polishing apparatus and polishing method

EBARA CORP6 citations73
US7547242B2Jun 16, 2009

Substrate polishing apparatus

EBARA CORP7 citations73
US8951813B2Feb 10, 2015

Method of polishing a substrate having a film on a surface of the substrate for semiconductor manufacturing

EBARA CORP5 citations72

SEIKO EPSON CORP

12 patents

YAKULT HONSHA KK

6 patents

KOBAYASHI YOICHI

4 patents

SHIMADZU CORP

3 patents

CASIO COMPUTER CO LTD

1 patent

SHIMIZU NOBURU

1 patent

NIPPON SODA CO

1 patent

SONY CORP

1 patent

SHIN KOBE ELECTRIC MACHINERY

1 patent

KOASE TAKASHI

1 patent

KOIZUMI RYUYA

1 patent

Showing the top 50 of 78 patents by PatentIndex Score.