Inventor
NAKAI SHUNSUKE
JP21 patents
⚠️ This page may combine multiple inventors who share the name “NAKAI SHUNSUKE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
15 patentsUS6785010B2Aug 31, 2004
Substrate film thickness measurement method, substrate film thickness measurement apparatus and substrate processing apparatus
EBARA CORP35 citations96
US7645181B2Jan 12, 2010
Polishing state monitoring apparatus and polishing apparatus
EBARA CORP13 citations92
US7438627B2Oct 21, 2008
Polishing state monitoring method
EBARA CORP17 citations92
US7214122B2May 8, 2007
Substrate polishing apparatus
EBARA CORP19 citations92
US7072050B2Jul 4, 2006
Substrate film thickness measurement method, substrate film thickness measurement apparatus and substrate processing apparatus
EBARA CORP29 citations92
US6758723B2Jul 6, 2004
Substrate polishing apparatus
EBARA CORP20 citations92
US6657737B2Dec 2, 2003
Method and apparatus for measuring film thickness
EBARA CORP40 citations92
US7675634B2Mar 9, 2010
Substrate film thickness measurement method, substrate film thickness measurement apparatus and substrate processing apparatus
EBARA CORP4 citations74
US7585204B2Sep 8, 2009
Substrate polishing apparatus
EBARA CORP4 citations74
US7428064B2Sep 23, 2008
Substrate film thickness measurement method, substrate film thickness measurement apparatus and substrate processing apparatus
EBARA CORP4 citations74
US7547242B2Jun 16, 2009
Substrate polishing apparatus
EBARA CORP7 citations73
US8342907B2Jan 1, 2013
Polishing state monitoring method
EBARA CORP3 citations62
US7507144B2Mar 24, 2009
Substrate polishing apparatus
EBARA CORP3 citations62
US10207390B2Feb 19, 2019
Processing end point detection method, polishing method, and polishing apparatus
EBARA CORP1 citations61
US7510460B2Mar 31, 2009
Substrate polishing apparatus
EBARA CORP0 citations52
SHIMADZU CORP
4 patentsUS7252575B2Aug 7, 2007
Polishing state monitoring apparatus and polishing apparatus and method
SHIMADZU CORP44 citations95
US6942543B2Sep 13, 2005
Substrate polishing apparatus
SHIMADZU CORP12 citations92
US7241202B2Jul 10, 2007
Substrate polishing apparatus
SHIMADZU CORP4 citations74
US7101257B2Sep 5, 2006
Substrate polishing apparatus
SHIMADZU CORP3 citations62