Inventor
TSUKUDA YASUO
JP22 patents
⚠️ This page may combine multiple inventors who share the name “TSUKUDA YASUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SHIMADZU CORP
10 patentsUS7252575B2Aug 7, 2007
Polishing state monitoring apparatus and polishing apparatus and method
SHIMADZU CORP44 citations95
US6942543B2Sep 13, 2005
Substrate polishing apparatus
SHIMADZU CORP12 citations92
US5422483AJun 6, 1995
Near infrared analyzer
SHIMADZU CORP40 citations89
US8049884B2Nov 1, 2011
Spectrophotometer
SHIMADZU CORP14 citations84
US7576855B2Aug 18, 2009
Spectrophotometric method and apparatus
SHIMADZU CORP19 citations84
US7241202B2Jul 10, 2007
Substrate polishing apparatus
SHIMADZU CORP4 citations74
US5731594AMar 24, 1998
Infrared light source
SHIMADZU CORP14 citations71
US7101257B2Sep 5, 2006
Substrate polishing apparatus
SHIMADZU CORP3 citations62
US12163885B2Dec 10, 2024
Analysis device, analysis method, trace liquid collection device, and trace liquid collection method
SHIMADZU CORP0 citations47
US7830520B2Nov 9, 2010
Optical measurement device for trace liquid sample
SHIMADZU CORP0 citations41
EBARA CORP
7 patentsUS7645181B2Jan 12, 2010
Polishing state monitoring apparatus and polishing apparatus
EBARA CORP13 citations92
US7438627B2Oct 21, 2008
Polishing state monitoring method
EBARA CORP17 citations92
US6758723B2Jul 6, 2004
Substrate polishing apparatus
EBARA CORP20 citations92
US7585204B2Sep 8, 2009
Substrate polishing apparatus
EBARA CORP4 citations74
US7547242B2Jun 16, 2009
Substrate polishing apparatus
EBARA CORP7 citations73
US8342907B2Jan 1, 2013
Polishing state monitoring method
EBARA CORP3 citations62
US7510460B2Mar 31, 2009
Substrate polishing apparatus
EBARA CORP0 citations52