Inventor
MAUDIE THERESA A
US3 patents
Patents
3 patentsUS6401545B1Jun 11, 2002
Micro electro-mechanical system sensor with selective encapsulation and method therefor
MOTOROLA INC177 citations94
US5889211AMar 30, 1999
Media compatible microsensor structure and methods of manufacturing and using the same
MOTOROLA INC55 citations91
US6134941AOct 24, 2000
Method of testing sensors and apparatus therefor
MOTOROLA INC14 citations66