Inventor
MULE STAGNO LUCIANO
US8 patents
Patents
8 patentsUS6638357B2Oct 28, 2003
Method for revealing agglomerated intrinsic point defects in semiconductor crystals
MEMC ELECTRONIC MATERIALS22 citations92
US6391662B1May 21, 2002
Process for detecting agglomerated intrinsic point defects by metal decoration
MEMC ELECTRONIC MATERIALS22 citations92
US6284039B1Sep 4, 2001
Epitaxial silicon wafers substantially free of grown-in defects
MEMC ELECTRONIC MATERIALS27 citations92
US7201800B2Apr 10, 2007
Process for making silicon wafers with stabilized oxygen precipitate nucleation centers
MEMC ELECTRONIC MATERIALS15 citations82
US6808781B2Oct 26, 2004
Silicon wafers with stabilized oxygen precipitate nucleation centers and process for making the same
MEMC ELECTRONIC MATERIALS19 citations82
US7097718B2Aug 29, 2006
Single crystal silicon wafer having an epitaxial layer substantially free from grown-in defects
MEMC ELECTRONIC MATERIALS5 citations73
US6565649B2May 20, 2003
Epitaxial wafer substantially free of grown-in defects
MEMC ELECTRONIC MATERIALS9 citations73
US6635587B1Oct 21, 2003
Method for producing czochralski silicon free of agglomerated self-interstitial defects
MEMC ELECTRONIC MATERIALS6 citations62