Inventor

BROODBAKKER PETRUS JOHANNES MA

NL2 patents

Patents

2 patents

US6924884B2Aug 2, 2005

Off-axis leveling in lithographic projection apparatus

ASML NETHERLANDS BV23 citations86

US7248337B2Jul 24, 2007

Lithographic apparatus, level sensor, method of inspection, device manufacturing method, and device manufactured thereby

ASML NETHERLANDS BV13 citations79