Inventor
QUEENS RENE MARINUS GERARDUS J
NL4 patents
Patents
4 patentsUS7265364B2Sep 4, 2007
Level sensor for lithographic apparatus
ASML NETHERLANDS BV278 citations94
US7248337B2Jul 24, 2007
Lithographic apparatus, level sensor, method of inspection, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV13 citations79
US6906785B2Jun 14, 2005
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV11 citations70
US6987555B2Jan 17, 2006
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV5 citations60