Inventor
YANG JAE-HYUN
KR6 patents
Patents
6 patentsUS7850449B2Dec 14, 2010
Heat treatment equipment
SAMSUNG ELECTRONICS CO LTD466 citations95
US7326284B2Feb 5, 2008
Contamination control system and air-conditioning system of a substrate processing apparatus using the same
SAMSUNG ELECTRONICS CO LTD2 citations62
US12546004B2Feb 10, 2026
Semiconductor manufacturing apparatus
SAMSUNG ELECTRONICS CO LTD0 citations61
US11913114B2Feb 27, 2024
Semiconductor manufacturing apparatus
SAMSUNG ELECTRONICS CO LTD1 citations61
US10355099B2Jul 16, 2019
Semiconductor device
SAMSUNG ELECTRONICS CO LTD1 citations61
US11062818B2Jul 13, 2021
Stacking structure having material layer on graphene layer and method of forming material layer on graphene layer
SAMSUNG ELECTRONICS CO LTD0 citations47