Inventor
RAOUX SEBASTIEN
US23 patents
⚠️ This page may combine multiple inventors who share the name “RAOUX SEBASTIEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
22 patentsUS6187072B1Feb 13, 2001
Method and apparatus for reducing perfluorocompound gases from substrate processing equipment emissions
APPLIED MATERIALS INC154 citations99
US7736600B2Jun 15, 2010
Apparatus for manufacturing a process abatement reactor
APPLIED MATERIALS INC387 citations98
US6863019B2Mar 8, 2005
Semiconductor device fabrication chamber cleaning method and apparatus with recirculation of cleaning gas
APPLIED MATERIALS INC608 citations98
US6358573B1Mar 19, 2002
Mixed frequency CVD process
APPLIED MATERIALS INC130 citations98
US6194628B1Feb 27, 2001
Method and apparatus for cleaning a vacuum line in a CVD system
APPLIED MATERIALS INC170 citations98
US6193802B1Feb 27, 2001
Parallel plate apparatus for in-situ vacuum line cleaning for substrate processing equipment
APPLIED MATERIALS INC191 citations98
US6162709ADec 19, 2000
Use of an asymmetric waveform to control ion bombardment during substrate processing
APPLIED MATERIALS INC167 citations98
US6045618AApr 4, 2000
Microwave apparatus for in-situ vacuum line cleaning for substrate processing equipment
APPLIED MATERIALS INC130 citations98
US7004107B1Feb 28, 2006
Method and apparatus for monitoring and adjusting chamber impedance
APPLIED MATERIALS INC114 citations97
US6098568AAug 8, 2000
Mixed frequency CVD apparatus
APPLIED MATERIALS INC106 citations97
US6041734AMar 28, 2000
Use of an asymmetric waveform to control ion bombardment during substrate processing
APPLIED MATERIALS INC110 citations97
US6517913B1Feb 11, 2003
Method and apparatus for reducing perfluorocompound gases from substrate processing equipment emissions
APPLIED MATERIALS INC65 citations96
US6432256B1Aug 13, 2002
Implanatation process for improving ceramic resistance to corrosion
APPLIED MATERIALS INC63 citations96
US6680420B2Jan 20, 2004
Apparatus for cleaning an exhaust line in a semiconductor processing system
APPLIED MATERIALS INC45 citations95
US6136388AOct 24, 2000
Substrate processing chamber with tunable impedance
APPLIED MATERIALS INC63 citations95
US6366346B1Apr 2, 2002
Method and apparatus for optical detection of effluent composition
APPLIED MATERIALS INC89 citations94
US6888639B2May 3, 2005
In-situ film thickness measurement using spectral interference at grazing incidence
APPLIED MATERIALS INC21 citations92
US6354241B1Mar 12, 2002
Heated electrostatic particle trap for in-situ vacuum line cleaning of a substrated processing
APPLIED MATERIALS INC48 citations92
US7700049B2Apr 20, 2010
Methods and apparatus for sensing characteristics of the contents of a process abatement reactor
APPLIED MATERIALS INC24 citations89
US7160521B2Jan 9, 2007
Treatment of effluent from a substrate processing chamber
APPLIED MATERIALS INC52 citations89
US7970483B2Jun 28, 2011
Methods and apparatus for improving operation of an electronic device manufacturing system
APPLIED MATERIALS INC8 citations82
US7532952B2May 12, 2009
Methods and apparatus for pressure control in electronic device manufacturing systems
APPLIED MATERIALS INC3 citations61