Inventor

LI FAHONG

CN5 patents

⚠️ This page may combine multiple inventors who share the name “LI FAHONG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

2 patents

US10571812B2Feb 25, 2020

Method of calibrating focus measurements, measurement method and metrology apparatus, lithographic system and device manufacturing method

ASML NETHERLANDS BV2 citations66

US11022899B2Jun 1, 2021

Method of measuring a focus parameter relating to a structure formed using a lithographic process

ASML NETHERLANDS BV0 citations56

UNIV SOUTH CHINA NORMAL

2 patents

US11181733B2Nov 23, 2021

Method for preparing electrowetting display support plate

UNIV SOUTH CHINA NORMAL0 citations56

US9779672B2Oct 3, 2017

Oil puncture controlled starting system for EFD apparatus and manufacturing method therefor

UNIV SOUTH CHINA NORMAL0 citations39

ACAD SHENZHEN GUOHUA OPTOELECTRONICS

1 patent

US10310354B2Jun 4, 2019

Electrofluidic support plates and preparation method therefor, and electrofluidic apparatus

ACAD SHENZHEN GUOHUA OPTOELECTRONICS0 citations45