Inventor
OHIZUMI YUKIO
JP7 patents
⚠️ This page may combine multiple inventors who share the name “OHIZUMI YUKIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
6 patentsUS10221480B2Mar 5, 2019
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD19 citations85
US8034723B2Oct 11, 2011
Film deposition apparatus and film deposition method
TOKYO ELECTRON LTD19 citations82
US7674336B2Mar 9, 2010
Processing apparatus
TOKYO ELECTRON LTD11 citations78
US10584416B2Mar 10, 2020
Substrate processing apparatus
TOKYO ELECTRON LTD1 citations62
US11674225B2Jun 13, 2023
Substrate processing apparatus
TOKYO ELECTRON LTD0 citations51
US11572625B2Feb 7, 2023
Rotation detection jig, substrate processing apparatus and method of operating the substrate processing apparatus
TOKYO ELECTRON LTD0 citations51