Inventor
SAITO SYOBU
3 patents
Patents
3 patentsUS4588891AMay 13, 1986
Scanning type electron microscope
HITACHI LTD28 citations87
US4020353AApr 26, 1977
Sample analysis apparatus using electron beam irradiation
HITACHI LTD23 citations79
US4227080AOct 7, 1980
Device for shifting frozen specimen, for use in scanning type electron microscope
HITACHI LTD11 citations70