Inventor

HOGENSON SCOTT A

US2 patents

Patents

2 patents

US8048328B2Nov 1, 2011

Method for shaping a magnetic field in a magnetic field-enhanced plasma reactor

APPLIED MATERIALS INC7 citations80

US7883633B2Feb 8, 2011

Method for shaping a magnetic field in a magnetic field-enhanced plasma reactor

APPLIED MATERIALS INC3 citations59