Inventor
TAKAHOKO YOSHIHIRO
JP8 patents
⚠️ This page may combine multiple inventors who share the name “TAKAHOKO YOSHIHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
6 patentsUS12027342B2Jul 2, 2024
Charged particle beam device and axis adjustment method thereof
HITACHI HIGH TECH CORP0 citations60
US11764028B2Sep 19, 2023
Charged particle beam device and axis adjustment method thereof
HITACHI HIGH TECH CORP0 citations60
US11342155B2May 24, 2022
Charged particle beam device and method for adjusting position of detector of charged particle beam device
HITACHI HIGH TECH CORP0 citations60
US10312053B2Jun 4, 2019
Charged particle beam apparatus, alignment method of charged particle beam apparatus, alignment program, and storage medium
HITACHI HIGH TECH CORP1 citations55
US9349567B2May 24, 2016
Charged particle beam device
HITACHI HIGH TECH CORP0 citations51
US10176968B2Jan 8, 2019
Method for adjusting charged particle beam device and adjusting beam aperture based on a selected emission condition and charged particle beam device for same
HITACHI HIGH TECH CORP0 citations38