Inventor

FEYH ANDO

DE73 patents

⚠️ This page may combine multiple inventors who share the name “FEYH ANDO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

FEYH ANDO

BOSCH GMBH ROBERT

Packaging system and process for inertial sensor modules using moving-gate transducers

MEMS acoustic transducer with silicon nitride backplate and silicon sacrificial layer

Micromechanical functional apparatus, particularly a loudspeaker apparatus, and appropriate method of manufacture

Sensor

Method for producing porous microneedles and their use

Exposed-die mold package for a sensor and method for encapsulating a sensor that interacts with the environment

Trench based capacitive humidity sensor

Resistive MEMS humidity sensor

MEMS device having a getter

Nanostructured gas sensor

Semiconductor sensor having a suspended structure and method of forming a semiconductor sensor having a suspended structure

System and method for remote temperature measurements in a harsh environment

Metamaterial and method for forming a metamaterial using atomic layer deposition

Robust inertial sensors

Micromechanical sensor apparatus with a movable gate, and corresponding production process

Inertial and pressure sensors on single chip

Serpentine IR sensor

Microelectronic component and corresponding production process

Micromechanical component having thin-layer encapsulation and production method

Radiation sensor element, method for producing a radiation sensor element and sensor field

Methods to combine radiation-based temperature sensor and inertial sensor and/or camera output in a handheld/mobile device

MEMS pressure sensor with multiple membrane electrodes

Thermally shorted bolometer

Thin-film encapsulated infrared sensor

Method for producing a micromechanical component having a thin-layer capping

Membrane for a capacitive MEMS pressure sensor and method of forming a capacitive MEMS pressure sensor

Method to modulate the sensitivity of a bolometer via negative interference

CMOS integrated moving-gate transducer with silicon as a functional layer

Portable device with temperature sensing

Capacitive MEMS sensor and method

Sensor with an embedded thermistor for precise local temperature measurement

Inertial and pressure sensors on single chip

Nanostructured lanthanum oxide humidity sensor

Resistive switching for MEMS devices

Capacitive pressure sensor and method

MEMS infrared sensor including a plasmonic lens

FEYH ANDO

Chip level sensor with multiple degrees of freedom

Manufacturing method for a micromechanical component having a thin-layer capping

Micromechanical component and method for its production

Micromechanical sensor apparatus having a movable gate and corresponding production method

BOSCH TOOL CORP

Combined pressure and humidity sensor

SCHOLTEN DICK

Manufacturing method for a porous microneedle array and corresponding porous microneedle array and corresponding substrate composite

RETTIG CHRISTIAN

Microsystem

SCHATZ FRANK

Magnetic field sensor and method for producing a magnetic field sensor

SAMARAO ASHWIN K

Li-ion battery with alumina coated porous silicon anode

BENZEL HUBERT

Sensor and method for its production

NEUL REINHARD

Piezoresistive micromechanical sensor component and corresponding measuring method

HERRMANN INGO

Thermally decoupled micro-structured reference element for sensors

REINMUTH JOCHEN

Sensor and method for the manufacture thereof

PIRK TJALF

Microelectromechanical sensor module and corresponding production method