Inventor
HASEGAWA KOYU
JP4 patents
Patents
4 patentsUS7059849B2Jun 13, 2006
Heat treatment system and a method for cooling a loading chamber
TOKYO ELECTRON LTD19 citations89
US10978322B2Apr 13, 2021
Transfer device, substrate processing apparatus, and transfer method
TOKYO ELECTRON LTD0 citations51
US10473399B2Nov 12, 2019
Connection structure, magnetic annealing device using same, and connecting method
TOKYO ELECTRON LTD0 citations39
US9939200B2Apr 10, 2018
Substrate transfer system and heat treatment apparatus using same
TOKYO ELECTRON LTD0 citations37