Inventor
IRVING JAMES W
US8 patents
Patents
8 patentsUS11215921B2Jan 4, 2022
Residual layer thickness compensation in nano-fabrication by modified drop pattern
CANON KK2 citations71
US11209730B2Dec 28, 2021
Methods of generating drop patterns, systems for shaping films with the drop pattern, and methods of manufacturing an article with the drop pattern
CANON KK2 citations69
US11768445B2Sep 26, 2023
Method and apparatus to register template with spatial light modulator
CANON KK0 citations58
US12325046B2Jun 10, 2025
Superstrate including a body and layers and methods of forming and using the same
CANON KK0 citations50
US11762295B2Sep 19, 2023
Fluid droplet methodology and apparatus for imprint lithography
CANON KK0 citations50
US12523934B2Jan 13, 2026
Apparatus and method for calibrating a fluid dispenser
CANON KK0 citations46
US11747731B2Sep 5, 2023
Curing a shaped film using multiple images of a spatial light modulator
CANON KK0 citations45
US11262651B2Mar 1, 2022
System for detecting accumulated material on a faceplate of a dispenser and method of inspecting the faceplate
CANON KK0 citations43