Inventor
NA DONGHYEON
KR9 patents
Patents
9 patentsUS11545341B2Jan 3, 2023
Plasma etching method and semiconductor device fabrication method including the same
SAMSUNG ELECTRONICS CO LTD4 citations71
US11367597B2Jun 21, 2022
Electrostatic chuck and plasma processing apparatus including the same
SAMSUNG ELECTRONICS CO LTD4 citations71
US11282679B2Mar 22, 2022
Plasma control apparatus and plasma processing system including the same
SAMSUNG ELECTRONICS CO LTD2 citations67
US12020903B2Jun 25, 2024
Plasma etching method and semiconductor device fabrication method including the same
SAMSUNG ELECTRONICS CO LTD0 citations59
US12476089B2Nov 18, 2025
Plasma processing apparatus
SAMSUNG ELECTRONICS CO LTD0 citations55
US12543535B2Feb 3, 2026
Chuck assembly, fabrication system therewith, and method of fabricating semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD0 citations46
US12222362B2Feb 11, 2025
Method of measuring parameters of plasma, apparatus for measuring parameters of plasma, plasma processing system, and method of processing wafer
SAMSUNG ELECTRONICS CO LTD0 citations45
US12014905B2Jun 18, 2024
Apparatus and method fabricating semiconductor device
SAMSUNG ELECTRONICS CO LTD0 citations45
US12573590B2Mar 10, 2026
Plasma processing apparatus and method of manufacturing semiconductor device by using same
SAMSUNG ELECTRONICS CO LTD0 citations44