Inventor
HWANG BEOMSOO
KR12 patents
Patents
12 patentsUS12214491B2Feb 4, 2025
Transfer robot for transferring gas container, gas supply cabinet, and gas supply system including the same
SAMSUNG ELECTRONICS CO LTD2 citations68
US12217984B2Feb 4, 2025
Wafer processing apparatus including EFEM and method of processing wafer
SAMSUNG ELECTRONICS CO LTD1 citations60
US11804393B2Oct 31, 2023
Wafer processing apparatus including equipment front end module (EFEM) and wafer processing method using the same
SAMSUNG ELECTRONICS CO LTD1 citations57
US12535153B2Jan 27, 2026
Apparatus for folding tube
SAMSUNG ELECTRONICS CO LTD0 citations55
US12264747B2Apr 1, 2025
Loadlock apparatus and substrate processing apparatus including the same
SAMSUNG ELECTRONICS CO LTD0 citations48
US12412768B2Sep 9, 2025
Semiconductor substrate processing apparatus
SAMSUNG ELECTRONICS CO LTD0 citations47
US11920689B2Mar 5, 2024
Loose type pneumatic valve and loose type pneumatic valve module including the same
SAMSUNG ELECTRONICS CO LTD0 citations47
US12469726B2Nov 11, 2025
Semiconductor processing device and semiconductor processing system
SAMSUNG ELECTRONICS CO LTD0 citations46
US12224191B2Feb 11, 2025
Wafer transfer apparatus with aligner
SAMSUNG ELECTRONICS CO LTD0 citations46
US12523696B2Jan 13, 2026
Measuring apparatus for semiconductor device and measuring method using the same
SAMSUNG ELECTRONICS CO LTD0 citations45
US11846391B2Dec 19, 2023
Gas supply apparatus
SAMSUNG ELECTRONICS CO LTD0 citations45
US12558775B2Feb 24, 2026
Robot apparatus and robot system
SAMSUNG ELECTRONICS CO LTD0 citations43