Inventor
RONDE MICHAËL JOHANNES CHRISTIAAN
NL4 patents
Patents
4 patentsUS11637512B2Apr 25, 2023
Object table comprising an electrostatic clamp
ASML NETHERLANDS BV0 citations57
US11131937B2Sep 28, 2021
Positioning device, stiffness reduction device and electron beam apparatus
ASML NETHERLANDS BV0 citations57
US12591183B2Mar 31, 2026
Sensor positioning method, a positioning system, a lithographic apparatus, a metrology apparatus, and a device manufacturing method
ASML NETHERLANDS BV0 citations54
US12249481B2Mar 11, 2025
Stage anti-fretting mechanism for roller bearing lifetime improvement
ASML NETHERLANDS BV0 citations44