Inventor
HAN SANG-YEOB
KR7 patents
⚠️ This page may combine multiple inventors who share the name “HAN SANG-YEOB”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
4 patentsUS8043970B2Oct 25, 2011
Slurry compositions for selectively polishing silicon nitride relative to silicon oxide, methods of polishing a silicon nitride layer and methods of manufacturing a semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD15 citations83
US7678625B2Mar 16, 2010
Methods of fabricating semiconductor devices including channel layers having improved defect density and surface roughness characteristics
SAMSUNG ELECTRONICS CO LTD8 citations82
US8008172B2Aug 30, 2011
Methods of forming semiconductor devices including multistage planarization and crystalization of a semiconductor layer
SAMSUNG ELECTRONICS CO LTD3 citations61
US8048808B2Nov 1, 2011
Slurry compositions for polishing metal, methods of polishing a metal object and methods of forming a metal wiring using the same
SAMSUNG ELECTRONICS CO LTD0 citations41