Inventor
SHIOZAWA HISASHI
JP3 patents
Patents
3 patentsUS5692728ADec 2, 1997
Supporting device having elastic members with oscillation mechanisms
NIKON CORP17 citations66
US6963408B2Nov 8, 2005
Method and apparatus for point diffraction interferometry
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US6940605B2Sep 6, 2005
Method for measuring interference and apparatus for measuring interference
NIKON CORP0 citations37