Inventor
PARK KIEJIN
US5 patents
⚠️ This page may combine multiple inventors who share the name “PARK KIEJIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
3 patentsUS8900999B1Dec 2, 2014
Low temperature high pressure high H2/WF6 ratio W process for 3D NAND application
APPLIED MATERIALS INC423 citations98
US9169556B2Oct 27, 2015
Tungsten growth modulation by controlling surface composition
APPLIED MATERIALS INC9 citations82
US9938622B2Apr 10, 2018
Method to deposit CVD ruthenium
APPLIED MATERIALS INC2 citations72