Inventor

SHIBATA HAYATO

JP3 patents

⚠️ This page may combine multiple inventors who share the name “SHIBATA HAYATO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SHIBATA HAYATO

2 patents

US8188449B2May 29, 2012

Charged particle beam drawing method and apparatus

SHIBATA HAYATO4 citations58

US8076656B2Dec 13, 2011

Writing apparatus and writing data conversion method

SHIBATA HAYATO6 citations54

NUFLARE TECHNOLOGY INC

1 patent

US7926007B2Apr 12, 2011

Writing apparatus, writing data conversion method, and computer-readable recording medium storing program using Huffman tree for converting writing data in lithographic process

NUFLARE TECHNOLOGY INC7 citations77