Inventor

VAN BALLEGOIJ ROBERTUS NICODEMUS JACOBUS

NL4 patents

⚠️ This page may combine multiple inventors who share the name “VAN BALLEGOIJ ROBERTUS NICODEMUS JACOBUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

3 patents

US9213246B2Dec 15, 2015

KEMPER NICOLAAS RUDOLF

1 patent

US8654309B2Feb 18, 2014

Fluid extraction system, lithographic apparatus and device manufacturing method

KEMPER NICOLAAS RUDOLF3 citations60

VAN BALLEGOIJ ROBERTUS NICODEMUS JACOBUS

ASML NETHERLANDS BV

Fluid extraction system, lithographic apparatus and device manufacturing method

Lithographic apparatus and method

Gas flow optimization in reticle stage environment

KEMPER NICOLAAS RUDOLF

Fluid extraction system, lithographic apparatus and device manufacturing method