Inventor
NAKAGOMI MOTOKO
JP4 patents
Patents
4 patentsUS9390933B2Jul 12, 2016
Etching method, storage medium and etching apparatus
TOKYO ELECTRON LTD3 citations69
US10968514B2Apr 6, 2021
Substrate mounting table
TOKYO ELECTRON LTD0 citations56
US10319585B2Jun 11, 2019
Film forming method
TOKYO ELECTRON LTD0 citations38
US10504743B2Dec 10, 2019
Method of etching film
TOKYO ELECTRON LTD0 citations37