Inventor
HAMATANI MASATO
JP12 patents
⚠️ This page may combine multiple inventors who share the name “HAMATANI MASATO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
7 patentsUS5534970AJul 9, 1996
Scanning exposure apparatus
NIKON CORP200 citations98
US6961115B2Nov 1, 2005
Specification determining method, projection optical system making method and adjusting method, exposure apparatus and making method thereof, and computer system
NIKON CORP45 citations94
US6222610B1Apr 24, 2001
Exposure apparatus
NIKON CORP36 citations92
US5425045AJun 13, 1995
Short wavelength laser optical apparatus
NIKON CORP27 citations92
US7215408B2May 8, 2007
Specification determining method, projection optical system making method and adjusting method, exposure apparatus and making method thereof, and computer system
NIKON CORP13 citations82
US6686989B2Feb 3, 2004
Exposure apparatus
NIKON CORP11 citations73
US6215808B1Apr 10, 2001
Laser apparatus, exposure apparatus, lithography system, method for producing circuit elements, gas supply system and gas supply method
NIKON CORP11 citations69