Inventor
YAMAMURA MITSUGU
JP5 patents
Patents
5 patentsUS4937618AJun 26, 1990
Alignment and exposure apparatus and method for manufacture of integrated circuits
CANON KK57 citations95
US5365342ANov 15, 1994
Alignment and exposure apparatus and method for manufacture of integrated circuits
CANON KK28 citations92
US5050111ASep 17, 1991
Alignment and exposure apparatus and method for manufacture of integrated circuits
CANON KK31 citations92
US4600282AJul 15, 1986
Alignment apparatus
CANON KK43 citations90
US4669842AJun 2, 1987
Projection optical device
CANON KK20 citations79