Inventor
FUKUDA SEIICHI
JP6 patents
⚠️ This page may combine multiple inventors who share the name “FUKUDA SEIICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SONY CORP
5 patentsUS5660681AAug 26, 1997
Method for removing sidewall protective film
SONY CORP40 citations91
US5880035AMar 9, 1999
Dry etching method
SONY CORP18 citations90
US5698072ADec 16, 1997
Dry etching method
SONY CORP31 citations90
US7000565B2Feb 21, 2006
Plasma surface treatment system and plasma surface treatment method
SONY CORP11 citations83
US6723652B1Apr 20, 2004
Dry etching method and method of manufacturing semiconductor apparatus
SONY CORP15 citations82