Inventor
ADAMS DAVID V
US7 patents
⚠️ This page may combine multiple inventors who share the name “ADAMS DAVID V”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
4 patentsUS5194401AMar 16, 1993
Thermally processing semiconductor wafers at non-ambient pressures
APPLIED MATERIALS INC580 citations98
US4920918AMay 1, 1990
Pressure-resistant thermal reactor system for semiconductor processing
APPLIED MATERIALS INC416 citations98
US5108792AApr 28, 1992
Double-dome reactor for semiconductor processing
APPLIED MATERIALS INC214 citations97
US5085887AFeb 4, 1992
Wafer reactor vessel window with pressure-thermal compensation
APPLIED MATERIALS INC86 citations95