Inventor
SHIGYO YOSHIHARU
JP6 patents
⚠️ This page may combine multiple inventors who share the name “SHIGYO YOSHIHARU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
4 patentsUS5463459AOct 31, 1995
Method and apparatus for analyzing the state of generation of foreign particles in semiconductor fabrication process
HITACHI LTD145 citations99
US6542830B1Apr 1, 2003
Process control system
HITACHI LTD93 citations96
US6650409B1Nov 18, 2003
Semiconductor device producing method, system for carrying out the same and semiconductor work processing apparatus included in the same system
HITACHI LTD39 citations92
US6757621B2Jun 29, 2004
Process management system
HITACHI LTD35 citations91
RENESAS TECH CORP
2 patentsUS7177020B2Feb 13, 2007
Method and apparatus for analyzing the state of generation of foreign particles in semiconductor fabrication process
RENESAS TECH CORP15 citations92
US6894773B2May 17, 2005
Method and apparatus for analyzing the state of generation of foreign particles in semiconductor fabrication process
RENESAS TECH CORP11 citations74