Inventor

LEE KWANG-MYUNG

KR4 patents

⚠️ This page may combine multiple inventors who share the name “LEE KWANG-MYUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SAMSUNG ELECTRONICS CO LTD

3 patents

US6869500B2Mar 22, 2005

PARK TEA-JIN

1 patent

US8083507B2Dec 27, 2011

Vacuum pump having rotation body cleaning unit with spraying holes on an output surface of the cleaning body surrounding a shaft

PARK TEA-JIN2 citations56

LEE KWANG-MYUNG

SAMSUNG ELECTRONICS CO LTD

Method for processing a wafer and apparatus for performing the same

Etching apparatus and etching method

Etching method

PARK TEA-JIN

Vacuum pump having rotation body cleaning unit with spraying holes on an output surface of the cleaning body surrounding a shaft