Inventor
KOPPERT ROLAND
DE7 patents
⚠️ This page may combine multiple inventors who share the name “KOPPERT ROLAND”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SCHWANDNER JUERGEN
6 patentsUS8647985B2Feb 11, 2014
Method for polishing a substrate composed of semiconductor material
SCHWANDNER JUERGEN6 citations71
US8721390B2May 13, 2014
Method for the double-side polishing of a semiconductor wafer
SCHWANDNER JUERGEN3 citations60
US8338302B2Dec 25, 2012
Method for polishing a semiconductor wafer with a strained-relaxed Si1−xGex layer
SCHWANDNER JUERGEN5 citations60
US8882565B2Nov 11, 2014
Method for polishing a semiconductor wafer
SCHWANDNER JUERGEN0 citations49
US8551870B2Oct 8, 2013
Method for producing an epitaxially coated semiconductor wafer
SCHWANDNER JUERGEN1 citations49
US8444455B2May 21, 2013
Polishing pad and method for polishing a semiconductor wafer
SCHWANDNER JUERGEN1 citations49