Inventor
FODOR MARK A
US12 patents
⚠️ This page may combine multiple inventors who share the name “FODOR MARK A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
10 patentsUS5531835AJul 2, 1996
Patterned susceptor to reduce electrostatic force in a CVD chamber
APPLIED MATERIALS INC852 citations98
US5817406AOct 6, 1998
Ceramic susceptor with embedded metal electrode and brazing material connection
APPLIED MATERIALS INC61 citations96
US5680013AOct 21, 1997
Ceramic protection for heated metal surfaces of plasma processing chamber exposed to chemically aggressive gaseous environment therein and method of protecting such heated metal surfaces
APPLIED MATERIALS INC177 citations96
US5496142AMar 5, 1996
Slotted conical spring washer
APPLIED MATERIALS INC75 citations95
US10774423B2Sep 15, 2020
Tunable ground planes in plasma chambers
APPLIED MATERIALS INC41 citations94
US7024105B2Apr 4, 2006
Substrate heater assembly
APPLIED MATERIALS INC56 citations94
US5959409ASep 28, 1999
Ceramic protection for heated metal surfaces of plasma processing chamber exposed to chemically aggressive gaseous environment therein and method protecting such heated metal surfaces
APPLIED MATERIALS INC81 citations94
US5633073AMay 27, 1997
Ceramic susceptor with embedded metal electrode and eutectic connection
APPLIED MATERIALS INC81 citations94
US7922440B2Apr 12, 2011
Apparatus and method for centering a substrate in a process chamber
APPLIED MATERIALS INC6 citations63
US7354288B2Apr 8, 2008
Substrate support with clamping electrical connector
APPLIED MATERIALS INC4 citations60