Inventor
VELASTEGUI SOPHIA M
US4 patents
⚠️ This page may combine multiple inventors who share the name “VELASTEGUI SOPHIA M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
3 patentsUS7024105B2Apr 4, 2006
Substrate heater assembly
APPLIED MATERIALS INC56 citations94
US7582167B2Sep 1, 2009
Apparatus for reducing entrapment of foreign matter along a moveable shaft of a substrate support
APPLIED MATERIALS INC15 citations83
US7279049B2Oct 9, 2007
Apparatus for reducing entrapment of foreign matter along a moveable shaft of a substrate support
APPLIED MATERIALS INC7 citations72