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Inventor
SUNG-HOON JUNG
US
2 patents
⚠️ This page may combine multiple inventors who share the name “SUNG-HOON JUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
RAISANEN PETRI
1 patent
US8802201B2
Aug 12, 2014
Systems and methods for thin-film deposition of metal oxides using excited nitrogen-oxygen species
RAISANEN PETRI
539 citations
94
ASM IP HOLDING BV
1 patent
US10804098B2
Oct 13, 2020
Systems and methods for thin-film deposition of metal oxides using excited nitrogen-oxygen species
ASM IP HOLDING BV
6 citations
80