Inventor
ITO FUYUMA
JP11 patents
⚠️ This page may combine multiple inventors who share the name “ITO FUYUMA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KIOXIA CORP
5 patentsUS11616120B2Mar 28, 2023
Semiconductor substrate, method of manufacturing semiconductor device, and method of manufacturing semiconductor substrate
KIOXIA CORP2 citations69
US11342182B2May 24, 2022
Substrate treatment device, substrate treatment method, and semiconductor device manufacturing method
KIOXIA CORP1 citations61
US11784064B2Oct 10, 2023
Substrate treatment apparatus and manufacturing method of semiconductor device
KIOXIA CORP0 citations60
US12532515B2Jan 20, 2026
Semiconductor substrate, method of manufacturing semiconductor device, and method of manufacturing semiconductor substrate
KIOXIA CORP0 citations59
US12512335B2Dec 30, 2025
Substrate processing apparatus, substrate processing method, and method of manufacturing semiconductor device
KIOXIA CORP0 citations56
TOSHIBA MEMORY CORP
5 patentsUS11171022B2Nov 9, 2021
Substrate treatment apparatus and method of manufacturing semiconductor device
TOSHIBA MEMORY CORP0 citations60
US9991159B2Jun 5, 2018
Semiconductor device manufacture method
TOSHIBA MEMORY CORP1 citations51
US10879087B2Dec 29, 2020
Substrate treatment apparatus and manufacturing method of semiconductor device
TOSHIBA MEMORY CORP0 citations49
US10804221B2Oct 13, 2020
Substrate treatment apparatus, method of manufacturing semiconductor device and workpiece substrate
TOSHIBA MEMORY CORP0 citations49
US10720321B2Jul 21, 2020
Substrate treating method and semiconductor device manufacturing method
TOSHIBA MEMORY CORP0 citations48