Inventor
KITAGAWA HAKUBA
JP9 patents
⚠️ This page may combine multiple inventors who share the name “KITAGAWA HAKUBA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KIOXIA CORP
5 patentsUS11616120B2Mar 28, 2023
Semiconductor substrate, method of manufacturing semiconductor device, and method of manufacturing semiconductor substrate
KIOXIA CORP2 citations69
US12243751B2Mar 4, 2025
Chemical solution, etching method, and method for manufacturing semiconductor device
KIOXIA CORP0 citations61
US11342182B2May 24, 2022
Substrate treatment device, substrate treatment method, and semiconductor device manufacturing method
KIOXIA CORP1 citations61
US11784064B2Oct 10, 2023
Substrate treatment apparatus and manufacturing method of semiconductor device
KIOXIA CORP0 citations60
US12532515B2Jan 20, 2026
Semiconductor substrate, method of manufacturing semiconductor device, and method of manufacturing semiconductor substrate
KIOXIA CORP0 citations59
TOSHIBA MEMORY CORP
4 patentsUS11171022B2Nov 9, 2021
Substrate treatment apparatus and method of manufacturing semiconductor device
TOSHIBA MEMORY CORP0 citations60
US11211267B2Dec 28, 2021
Substrate processing apparatus and substrate processing method
TOSHIBA MEMORY CORP0 citations59
US10879087B2Dec 29, 2020
Substrate treatment apparatus and manufacturing method of semiconductor device
TOSHIBA MEMORY CORP0 citations49
US10804221B2Oct 13, 2020
Substrate treatment apparatus, method of manufacturing semiconductor device and workpiece substrate
TOSHIBA MEMORY CORP0 citations49