Inventor
WAN ZHIWEN
US12 patents
⚠️ This page may combine multiple inventors who share the name “WAN ZHIWEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AIR LIQUIDE
8 patentsUS11008351B2May 18, 2021
Methods for vapor deposition of group 4 transition metal-containing films using Group 4 transition metal-containing films forming compositions
AIR LIQUIDE0 citations62
US11739220B2Aug 29, 2023
Perhydropolysilazane compositions and methods for forming oxide films using same
AIR LIQUIDE1 citations61
US11203528B2Dec 21, 2021
N—H free and Si-rich per-hydridopolysilzane compositions, their synthesis, and applications
AIR LIQUIDE0 citations61
US10647578B2May 12, 2020
N—H free and SI-rich per-hydridopolysilzane compositions, their synthesis, and applications
AIR LIQUIDE1 citations61
US12173403B2Dec 24, 2024
Group 6 transition metal-containing compositions for vapor deposition of group 6 transition metal-containing films
AIR LIQUIDE0 citations58
US11021793B2Jun 1, 2021
Group 6 transition metal-containing compositions for vapor deposition of group 6 transition metal-containing films
AIR LIQUIDE0 citations57
US12368042B2Jul 22, 2025
Precursors and processes for deposition of Si-containing films using ALD at temperature of 550° C. or higher
AIR LIQUIDE0 citations53
US10669160B2Jun 2, 2020
Heterogeneous wet synthesis process for preparation of high purity tungsten pentahalide
AIR LIQUIDE0 citations49