P

Inventor

LIU YIJUN

CN60 patents
⚠️ This page may combine multiple inventors who share the name “LIU YIJUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

13 patents
US12125675B2Oct 22, 2024

RF pulsing assisted low-k film deposition with high mechanical strength

APPLIED MATERIALS INC2 citations72
US11621162B2Apr 4, 2023

Systems and methods for forming UV-cured low-κ dielectric films

APPLIED MATERIALS INC2 citations71
US11600486B2Mar 7, 2023

Systems and methods for depositing low-κdielectric films

APPLIED MATERIALS INC2 citations71
US7964442B2Jun 21, 2011

Methods to obtain low k dielectric barrier with superior etch resistivity

APPLIED MATERIALS INC2 citations63
US7851384B2Dec 14, 2010

Method to mitigate impact of UV and E-beam exposure on semiconductor device film properties by use of a bilayer film

APPLIED MATERIALS INC2 citations62
US12119223B2Oct 15, 2024

Single precursor low-k film deposition and UV cure for advanced technology node

APPLIED MATERIALS INC0 citations60
US11572622B2Feb 7, 2023

Systems and methods for cleaning low-k deposition chambers

APPLIED MATERIALS INC0 citations60
US12525447B2Jan 13, 2026

Systems and methods for depositing low-k dielectric films

APPLIED MATERIALS INC0 citations59
US11967498B2Apr 23, 2024

Systems and methods for depositing low-k dielectric films

APPLIED MATERIALS INC1 citations59
US12500080B2Dec 16, 2025

Systems and methods for depositing low-K dielectric films

APPLIED MATERIALS INC0 citations58
US11990332B2May 21, 2024

Methods and apparatus for deposition of low-k films

APPLIED MATERIALS INC0 citations51
US11830728B2Nov 28, 2023

Methods for seamless gap filling of dielectric material

APPLIED MATERIALS INC0 citations50
US11710631B2Jul 25, 2023

Tensile nitride deposition systems and methods

APPLIED MATERIALS INC0 citations48

MONALISA GROUP CO LTD

5 patents

EXXONMOBIL TECHNOLOGY & ENGINEERING COMPANY

5 patents

TOKYO ELECTRON LTD

4 patents

LIU YIJUN

4 patents

ZHEJIANG CHIC ROBOT TECH CO LTD

3 patents

KURUKCHI SABAH A

2 patents

UNIV JIANGSU

2 patents

ASM JAPAN

2 patents

CHEN AIHUA

1 patent

MORRIS JON D

1 patent

JINAN WINSON NEW MATERIALS TECH CO LTD

1 patent

UNIV SUN YAT SEN

1 patent

LUMI LEGEND CORP

1 patent

AMGEN INC

1 patent

HUAWEI TECH CO LTD

1 patent

SHENZHEN CHINA STAR OPTOELECT

1 patent

BEIJING ZITIAO NETWORK TECHNOLOGY CO LTD

1 patent

CHIHARA SHUICHI

1 patent

Showing the top 50 of 60 patents by PatentIndex Score.