Inventor
CHIAO STEVE H
US7 patents
⚠️ This page may combine multiple inventors who share the name “CHIAO STEVE H”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
5 patentsUS6302964B1Oct 16, 2001
One-piece dual gas faceplate for a showerhead in a semiconductor wafer processing system
APPLIED MATERIALS INC986 citations98
US6086677AJul 11, 2000
Dual gas faceplate for a showerhead in a semiconductor wafer processing system
APPLIED MATERIALS INC1,102 citations98
US6364954B2Apr 2, 2002
High temperature chemical vapor deposition chamber
APPLIED MATERIALS INC342 citations97
US7699295B2Apr 20, 2010
Ampoule splash guard apparatus
APPLIED MATERIALS INC9 citations83
US9593417B2Mar 14, 2017
Gas line weldment design and process for CVD aluminum
APPLIED MATERIALS INC0 citations51